发明名称 |
OPTICAL IMAGING SYSTEM WITH CATOPTRIC OBJECTIVE; BROADBAND OBJECTIVE WITH MIRROR; AND REFRACTIVE LENSES AND BROADBAND OPTICAL IMAGING SYSTEM HAVING TWO OR MORE IMAGING PATHS |
摘要 |
An optical system may include an objective having at least four mirrors including an outermost mirror with aspect ratio <20:1 and focusing optics including a refractive optical element. The objective provides imaging at numerical aperture >0.7, central obscuration <35% in pupil. An objective may have two or more mirrors, one with a refractive module that seals off an outermost mirror's central opening. A broad band imaging system may include one objective and two or more imaging paths that provide imaging at numerical aperture >0.7 and field of view >0.8 mm. An optical imaging system may comprise an objective and two or more imaging paths. The imaging paths may provide two or more simultaneous broadband images of a sample in two or more modes. The modes may have different illumination and/or collection pupil apertures or different pixel sizes at the sample.
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申请公布号 |
US2013155399(A9) |
申请公布日期 |
2013.06.20 |
申请号 |
US20100750488 |
申请日期 |
2010.03.30 |
申请人 |
HWANG SHIOW-HWEI;KIRK GREGORY L.;JEONG HWAN J.;SHAFER DAVID;HUDYMA RUSSELL;KLA-TENCOR CORPORATION |
发明人 |
HWANG SHIOW-HWEI;KIRK GREGORY L.;JEONG HWAN J.;SHAFER DAVID;HUDYMA RUSSELL |
分类号 |
G01N21/88;G02B17/08 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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