发明名称 OPTICAL IMAGING SYSTEM WITH CATOPTRIC OBJECTIVE; BROADBAND OBJECTIVE WITH MIRROR; AND REFRACTIVE LENSES AND BROADBAND OPTICAL IMAGING SYSTEM HAVING TWO OR MORE IMAGING PATHS
摘要 An optical system may include an objective having at least four mirrors including an outermost mirror with aspect ratio <20:1 and focusing optics including a refractive optical element. The objective provides imaging at numerical aperture >0.7, central obscuration <35% in pupil. An objective may have two or more mirrors, one with a refractive module that seals off an outermost mirror's central opening. A broad band imaging system may include one objective and two or more imaging paths that provide imaging at numerical aperture >0.7 and field of view >0.8 mm. An optical imaging system may comprise an objective and two or more imaging paths. The imaging paths may provide two or more simultaneous broadband images of a sample in two or more modes. The modes may have different illumination and/or collection pupil apertures or different pixel sizes at the sample.
申请公布号 US2013155399(A9) 申请公布日期 2013.06.20
申请号 US20100750488 申请日期 2010.03.30
申请人 HWANG SHIOW-HWEI;KIRK GREGORY L.;JEONG HWAN J.;SHAFER DAVID;HUDYMA RUSSELL;KLA-TENCOR CORPORATION 发明人 HWANG SHIOW-HWEI;KIRK GREGORY L.;JEONG HWAN J.;SHAFER DAVID;HUDYMA RUSSELL
分类号 G01N21/88;G02B17/08 主分类号 G01N21/88
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