,申请号JP20090074603-传众专利搜索

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发明名称
摘要
申请公布号	JP5214513(B2)	申请公布日期	2013.06.19
申请号	JP20090074603	申请日期	2009.03.25
申请人		发明人
分类号	H01L21/3065;C23C16/509;C23C16/52;H01L21/205;H01L21/31	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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