发明名称 |
WATER-REACTIVE AL COMPOSITE MATERIAL, WATER-REACTIVE THERMALLY SPRAYED AL FILM, PROCESS FOR PRODUCTION OF THERMALLY SPRAYED AL FILM, AND STRUCTURAL MEMBER FOR FILM-FORMING CHAMBER |
摘要 |
<p>Herein provided are a water-reactive Al-based composite material which is characterized in that it is produced by incorporating, into Al, 2.0 to 3.5% by mass of In, 0.2 to 0.5% by mass of Si and 0.13 to 0.25% by mass of Ti, and which can be dissolved in water through the reaction thereof in a water-containing atmosphere; a water-reactive Al-based thermally sprayed film produced using this composite material; a method for the production of this Al-based thermally sprayed film; and a constituent member for a film-forming chamber which is provided with this Al-based thermally sprayed film on the surface thereof.</p> |
申请公布号 |
KR20130065698(A) |
申请公布日期 |
2013.06.19 |
申请号 |
KR20137007585 |
申请日期 |
2011.08.12 |
申请人 |
ULVAC, INC. |
发明人 |
KADOWAKI YUTAKA;SAITOU TOMOKO;MUSHIAKE KATSUHIKO |
分类号 |
C23C4/06;C22C21/00;C23C14/00;C23C16/44 |
主分类号 |
C23C4/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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