发明名称 WATER-REACTIVE AL COMPOSITE MATERIAL, WATER-REACTIVE THERMALLY SPRAYED AL FILM, PROCESS FOR PRODUCTION OF THERMALLY SPRAYED AL FILM, AND STRUCTURAL MEMBER FOR FILM-FORMING CHAMBER
摘要 <p>Herein provided are a water-reactive Al-based composite material which is characterized in that it is produced by incorporating, into Al, 2.0 to 3.5% by mass of In, 0.2 to 0.5% by mass of Si and 0.13 to 0.25% by mass of Ti, and which can be dissolved in water through the reaction thereof in a water-containing atmosphere; a water-reactive Al-based thermally sprayed film produced using this composite material; a method for the production of this Al-based thermally sprayed film; and a constituent member for a film-forming chamber which is provided with this Al-based thermally sprayed film on the surface thereof.</p>
申请公布号 KR20130065698(A) 申请公布日期 2013.06.19
申请号 KR20137007585 申请日期 2011.08.12
申请人 ULVAC, INC. 发明人 KADOWAKI YUTAKA;SAITOU TOMOKO;MUSHIAKE KATSUHIKO
分类号 C23C4/06;C22C21/00;C23C14/00;C23C16/44 主分类号 C23C4/06
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