发明名称 TEST HANDLER
摘要 PURPOSE: A test handler is provided to enable a test tray moving from a test chamber to a desoak chamber to stop at a stop position accurately and then to be transported to a required setting position. CONSTITUTION: A first transportation device transports a test tray from a soak chamber to a test chamber. A stopping device(680) includes a stopper(681), a locker(682), a releaser(683) and an actuator(684). The stopper stops the test tray at a required stop position. The locker fixes the test tray to return to an opposite direction to the transportation direction by a reaction force by the stopper, when the test tray collides with the stopper. The releaser applies external force to overcome elastic force of an elastic member(682b) according to the rotation state. The actuator locates the stopper on a closed path(C) or actuates the stopper to deviate from the closed path. A second transportation device transports the test tray from the stop position to a set position required in a desoak chamber.
申请公布号 KR20130064204(A) 申请公布日期 2013.06.18
申请号 KR20110130698 申请日期 2011.12.08
申请人 TECHWING CO., LTD. 发明人 SUNG, KI JOO
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
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