发明名称 Method for fabricating a porous semiconductor body region
摘要 A method may include producing at least one trench in a semiconductor body, starting from a surface of the semiconductor body, then producing at least one porous semiconductor body region in the semiconductor body starting from the at least one trench at least along a portion of the side walls of the trench, and then filling the trench with a semiconductor material of the semiconductor body.
申请公布号 US8466046(B2) 申请公布日期 2013.06.18
申请号 US201213407728 申请日期 2012.02.28
申请人 SCHULZE HANS-JOACHIM;MAUDER ANTON;SANTOS RODRIGUEZ FRANCISCO JAVIER;INFINEON TECHNOLOGIES AG 发明人 SCHULZE HANS-JOACHIM;MAUDER ANTON;SANTOS RODRIGUEZ FRANCISCO JAVIER
分类号 H01L21/20;H01L21/36 主分类号 H01L21/20
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