| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a contact part detection apparatus and a contact part detection method capable of clearly detecting a contact part between a transparent body having a protrusion and a sample. <P>SOLUTION: Light is irradiated from a hollow ring-like light source 11 to a rubber plate 22 from the side of a sapphire lens 21 and an interference fringe formed by reflecting light on two surfaces of the rubber plate 22 and the sapphire lens 21, which are pressed to each other, is image-formed on a CCD camera 17 through a hollow part on the inside of the ring-like light source 11 to detect a contact part between the rubber plate 22 and the sapphire lens 21. <P>COPYRIGHT: (C)2013,JPO&INPIT |
