APPARATUS AND METHOD FOR NANO IMPRINT LITHOGRAPHY

摘要

PURPOSE: A nano imprint lithography apparatus and a nano imprint lithography method are provided to secure an alignment system for removing the fractional error and the scale error between a stamp and a substrate. CONSTITUTION: A stamp(130) includes a main body(302), pillars(202), and an actuator(204). A pattern(135) is formed in the first surface of the main body. The pillars are formed in the second surface of the main body. The actuator applies force to the pillars to generate deformation. A control unit adjusts the actuator.