Filmbildungsvorrichtung und Verfahren zum Instandhalten einer Filmbildungsvorrichtung

摘要

Disclosed is a film-forming apparatus wherein ignition sections are provided at two areas on each of the lower portions of the side surfaces on both the sides of a film forming chamber, said ignition sections being provided at four areas in total. A current is carried to the ignition sections at the time of igniting a burnable by-product. On the side surface of the film-forming chamber, a first detecting section for measuring pressure inside of the film-forming chamber is formed. On the lower portion of the side surface of the film-forming chamber, a second detecting section is formed. On the upper portion of the film-forming chamber, a third detecting section for measuring the temperature of the space inside of the film-forming chamber is formed.