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发明名称
Plattenmagazin
摘要
申请公布号
DE102011013511(A8)
申请公布日期
2013.06.13
申请号
DE20111013511
申请日期
2011.03.10
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
GIESEN, TIM;FISCHMANN, CHRISTIAN;EHM, ALEXANDER
分类号
H01L21/673;H01L31/042;H01L31/18
主分类号
H01L21/673
代理机构
代理人
主权项
地址
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