| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a supply power regulator and a semiconductor manufacturing apparatus which are compact, excellent in temperature response, excellent in stability with respect to power source variation and load variation, and excellent in usability. <P>SOLUTION: The semiconductor manufacturing apparatus in which a substrate holder loaded with a plurality of substrates is carried into a reactor and the substrates are subjected to a heat treatment includes a heater 7 provided in the periphery of the reactor, and a supply power regulator 21 for regulating power to be supplied to the heater. The supply power regulator includes an IGBT converter 11 for power for converting an AC voltage of an AC power source 1 into an AC power corresponding to a frequency of a control signal, and supplying the converted AC power to the heater, and an IGBT converter for power regeneration for regenerating a counter electromotive force generated by a switching operation of the IGBT converter, and returning the regenerated power to the AC power source 1. <P>COPYRIGHT: (C)2013,JPO&INPIT |
