PIEZOELECTRIC MICROFLUIDIC PUMPING DEVICE AND METHOD FOR MAKING THE SAME

摘要

Disclosed herein is a microfluidic pumping device having a piezoelectric member positioned above a displaceable membrane. A voltage is applied across the piezoelectric member causing the piezoelectric member to displace the membrane. Displacement of the membrane increases and decreases pressure in a cavity that is below the membrane. The increases and decreases in pressure actuate cantilevered check valve members to facilitate unidirectional liquid flow through the pumping device.