Device and method for releasing a product substrate from a holder substrate

摘要

The device has a flexible film (3) connected with a film frame (1), and comprised of an adhesive layer for holding a product substrate (4) in a contact surface section of the film. The film is connected with the film frame in a fixing section of the film. A tub-type solvent container is formed by the film frame and the film for holding a solvent or fluid agent for loosening a connection section (6). The product substrate and the connection section are held in the container. An application unit applies solvent in the container. A removal unit removes the substrate from a carrier substrate (2). An independent claim is also included for a method for removal of the product substrate from the carrier substrate.