| 发明名称 |
HEATER SUPPORTING DEVICE |
| 摘要 |
PURPOSE: A heater supporting device is provided to prevent the damage of a maintenance piece by dispersing external force. CONSTITUTION: A maintenance piece(32) has a heating element supporting part. The heating element supporting part holds a heating element. The maintenance piece includes a fitting convex part(34) and an fitting concave part(37). The fitting convex part and the fitting concave part are formed in a horizontal direction. The cross sections of the convex part and the fitting concave part have semi-cylinder shapes.
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| 申请公布号 |
KR20130062301(A) |
申请公布日期 |
2013.06.12 |
| 申请号 |
KR20130044188 |
申请日期 |
2013.04.22 |
| 申请人 |
HITACHI KOKUSAI ELECTRIC INC. |
发明人 |
KOSUGI TETSUYA;MURATA HITOSHI;SUGIURA SHINOBU;UENO MASAAKI |
| 分类号 |
H01L21/22;H01L21/02;H01L21/324 |
主分类号 |
H01L21/22 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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