发明名称 Optical system and method of use
摘要 A method for improving imaging properties of an optical system and an optical system of this type having improved imaging properties are described. The optical system can have a plurality of optical elements. In some embodiments, an optical element is positioned and/or deformed by mechanical force action and by thermal action. In certain embodiments, one optical element is positioned and/or deformed by mechanical force action and another optical element is deformed by thermal action.
申请公布号 US8462315(B2) 申请公布日期 2013.06.11
申请号 US20090432921 申请日期 2009.04.30
申请人 CONRADI OLAF;CARL ZEISS SMT GMBH 发明人 CONRADI OLAF
分类号 G03B27/52 主分类号 G03B27/52
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