| 摘要 |
A lot processing start determining method includes: storing, in a memory, processing conditions of each lot in a first substrate vessel and a maximum usable number of dummy substrates in a second substrate vessel; counting the used number the dummy substrates in the second substrate vessel; and calculating the number of dummy substrates required to process all substrates of a next lot in the first substrate vessel based on the processing conditions of each lot which are stored in the memory, adding the calculated number of the dummy substrates of the next lot to the counted used number of the dummy substrates, and determining whether the added value exceeds the maximum usable number of the dummy substrates stored in the memory. The method further includes prohibiting start of processing the next lot when the added value is determined to exceed the maximum usable number of the dummy substrate. |
