| 摘要 |
<P>PROBLEM TO BE SOLVED: To disrupt easily along a curved disruption projected line, and to reduce a lug width. <P>SOLUTION: This scribing method which is a method for forming a scribe groove along a disruption projected line of a glass substrate, includes a heating-cooling step and a scanning step. In the heating-cooling step, a laser having an absorptive and transmissible wavelength is condensed so that the focal point is positioned on the periphery of the substrate surface to thereby irradiate a glass substrate, and a cooling medium is jetted out onto a laser irradiation region simultaneously with laser irradiation. In the scanning step, a laser spot by laser irradiation and a cooling spot by jetting out of the cooling medium are scanned along the disruption projected line. <P>COPYRIGHT: (C)2013,JPO&INPIT |
