| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface quality measuring machine capable of performing accurate measurement even when an inclination angle is changed to an optional angle and reducing a workload to a user even in a new stylus because of little memory capacity. <P>SOLUTION: The surface quality measuring machine includes: a measurement arm table storing the whole mass M of a measurement arm, arm length L from a supporting point (turning shaft 23) to a stylus 26B, and a horizontal center-of-gravity position Gx and a vertical center-of-gravity position Gz of the measurement arm when the measurement arm has a horizontal posture in each type of a measurement arm 24 with a second measurement arm 24B having different mass attached thereto; measurement arm designation means; an inclination angle detector for detecting an inclination angle θ1 of detection means; and a control device for reading M, L, Gx and Gz of the designated measurement arm from the measurement arm table, calculating difference between measuring force when the measurement arm has a horizontal posture and measuring force when the measurement arm has an inclination posture from M, L, Gx and Gz and the inclination angle θ1 detected by the inclination angle detector, and adjusting the measuring force with the difference as a correction value. <P>COPYRIGHT: (C)2013,JPO&INPIT |
