Testing apparatus for detecting e.g. material defects in surface of multi-layer structure flat electronics components, has receiver partially detecting heat distribution caused by transmitter by inductive coupling in sample

摘要

The apparatus has with a transmitter for subjecting a sample (42) with an electromagnetic field, where the transmitter is an array of coils (41) such that the electromagnetic field is inductively linked with the array of coils. A receiver partially detects a heat distribution caused by the transmitter by an inductive coupling in the sample. A transmitter modulation unit comprises the coils for amplitude modulated power supply. The modulation unit is designed such that locally and/or temporally changing gradient of the heat distribution is causable in the sample. An independent claim is also included for a testing method for detecting delaminations, cracks or material defects in a surface.