| 发明名称 |
NON-LINEAR KERF MONITOR AND DESIGN STRUCTURE THEREOF |
| 摘要 |
A non-linear kerf monitor, methods of manufacture and design structures are provided. The structure includes a coplanar waveguide provided in a kerf of a wafer between a first chip and a second chip. The structure further includes a shunt switch and a series switch coupled to the coplanar waveguide.
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| 申请公布号 |
US2013141114(A1) |
申请公布日期 |
2013.06.06 |
| 申请号 |
US201113309829 |
申请日期 |
2011.12.02 |
| 申请人 |
BOTULA ALAN B.;JOSEPH ALVIN J.;WOLF RANDY L.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BOTULA ALAN B.;JOSEPH ALVIN J.;WOLF RANDY L. |
| 分类号 |
G01R27/28;G06F17/50;H01L27/06 |
主分类号 |
G01R27/28 |
| 代理机构 |
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