发明名称 METHOD FOR PRODUCING NITRIDE CRYSTAL
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for producing a large sized nitride crystal having low dislocation and low distortion in which an influence of the curvature and distortion of a seed crystal on a crystal grown on the seed crystal is reduced. <P>SOLUTION: There is provided the method for producing the nitride crystal in which the nitride crystal is obtained by growing a grown crystal on the seed crystal in the a-axis direction and the grown crystal is grown in the a-axis direction of the seed crystal without substantial appearance of an A surface as a growth surface. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013107819(A) 申请公布日期 2013.06.06
申请号 JP20120251369 申请日期 2012.11.15
申请人 MITSUBISHI CHEMICALS CORP 发明人 FUJISAWA HIDEO;MIKAWA YUTAKA;KAMATA KAZUNORI
分类号 C30B29/38;C30B7/10 主分类号 C30B29/38
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