发明名称 X & Y ORTHOGONAL CUT DIRECTION PROCESSING WITH SET BEAM SEPARATION USING 45 DEGREE BEAM SPLIT ORIENTATION APPARATUS AND METHOD
摘要 <p>An X & Y orthogonal cut apparatus for scribing a pair of parallel cuts on a planar workpiece, the workpiece plane having an X-axis and a Y-axis, where the apparatus includes a laser device generating at least two beams including a first beam and a second beam, the first beam and the second beam each having an impact point on the workpiece, the first and second impact points being positioned diagonally with respect to the X and Y axes of the workpiece, and at least one actuator to move at least one of the impact points relative to the workpiece and the workpiece relative to the impact points.</p>
申请公布号 KR101271300(B1) 申请公布日期 2013.06.04
申请号 KR20087011714 申请日期 2006.05.12
申请人 发明人
分类号 B23K26/00;B23K26/38;H01L21/301;H01L21/304 主分类号 B23K26/00
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