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发明名称
PLASMA PROCESSING APPARATUS
摘要
申请公布号
KR20130056901(A)
申请公布日期
2013.05.30
申请号
KR20137008852
申请日期
2010.09.06
申请人
EMD CORPORATION
发明人
EBE AKINORI;WATANABE MASANORI
分类号
H05H1/46;C23C16/505;H01L21/205;H01L21/3065
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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