发明名称 |
CHEMICAL MAPPING USING THERMAL MICROSCOPY AT THE MICRO AND NANO SCALES |
摘要 |
A non-destructive method for chemical imaging with ~1 nm to 10 mum spatial resolution (depending on the type of heat source) without sample preparation and in a non-contact manner. In one embodiment, a sample undergoes photo-thermal heating using an IR laser and the resulting increase in thermal emissions is measured with either an IR detector or a laser probe having a visible laser reflected from the sample. In another embodiment, the infrared laser is replaced with a focused electron or ion source while the thermal emission is collected in the same manner as with the infrared heating. The achievable spatial resolution of this embodiment is in the 1-50 nm range.
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申请公布号 |
US2013134310(A1) |
申请公布日期 |
2013.05.30 |
申请号 |
US201213684535 |
申请日期 |
2012.11.25 |
申请人 |
FURSTENBERG ROBERT;KENDZIORA CHRIS;BASSIM NABIL D.;MCGILL ROBERT ANDREW;NGUYEN VIET K. |
发明人 |
FURSTENBERG ROBERT;KENDZIORA CHRIS;BASSIM NABIL D.;MCGILL ROBERT ANDREW;NGUYEN VIET K. |
分类号 |
G01J3/28;G01J3/02 |
主分类号 |
G01J3/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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