发明名称 |
Method of making BIO-MEMS devices |
摘要 |
<p>A MEMS device is manufactured by first forming a self-aligned monolayer (SAM) on a carrier wafer. Next, a first polymer layer is formed on the self-aligned monolayer. The first polymer layer is patterned form a microchannel cover, which is then bonded to a patterned second polymer layer on a device wafer to form microchannels. The carrier wafer is then released from the first polymer layer.</p> |
申请公布号 |
EP2204348(B1) |
申请公布日期 |
2013.05.29 |
申请号 |
EP20100150112 |
申请日期 |
2010.01.05 |
申请人 |
TELEDYNE DALSA SEMICONDUCTOR INC. |
发明人 |
MARTEL, STEPHANE;QUELLET, LUC |
分类号 |
B81C1/00;B82Y30/00 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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