发明名称 |
COMPOSITE SENSOR AND ACCELERATION SENSOR |
摘要 |
A first vibrator 4 is provided on a surface of a substrate 2 such that the vibrator 4 can vibrate in an X-axis direction. An angular-velocity-detecting vibrator 6 is provided inside the first vibrator 4 such that the vibrator 6 can be displaced in a Y-axis direction. A vibration generating unit 8 and a vibration monitor unit 20 are provided between the substrate 2 and the first vibrator 4. An angular-velocity-detecting displacement detecting unit 11 is provided between the substrate 2 and the angular-velocity-detecting vibrator 6. A second vibrator 15 is provided outside the first vibrator 4 such that the vibrator 15 can be displaced in the Y-axis direction. An acceleration-detecting displacement detecting unit 17 is provided between the first and second vibrators 4 and 15. An angular velocity detecting circuit 27 detects angular velocity by performing synchronous detection on a displacement detection signal Vc from the displacement detecting unit 11 by using a monitor signal Vm from the vibration monitor unit 20. On the other hand, an acceleration detecting circuit 31 detects acceleration by performing synchronous detection on a displacement detection signal Va from the displacement detecting unit 17 by using a monitor signal Vm from the vibration monitor unit 20. |
申请公布号 |
EP2075534(A4) |
申请公布日期 |
2013.05.29 |
申请号 |
EP20070807549 |
申请日期 |
2007.09.19 |
申请人 |
MURATA MANUFACTURING CO. LTD. |
发明人 |
KONAKA, YOSHIHIRO |
分类号 |
G01C19/56;G01C19/5726;G01C19/5747;G01P15/125;G01P15/18 |
主分类号 |
G01C19/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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