摘要 |
The invention relates to a laser machining head (1) with an integrated sensor device for monitoring the focus position, wherein laser machining head (1) has a focusing lens (4) and a downstream protective glass (5) in order to focus a machining beam (9) that strikes focusing lens (4) as a parallel beam into a resultant focal point (11) of focusing lens (4) with downstream protective glass (5), in which focal point a workpiece (12) is arranged. A beam splitter (3), arranged upstream of focusing lens (4) in the beam path, is transmissive for a first portion of a laser beam (8) coupled into laser machining head (1), the machining beam (9), and is reflective for a second portion, a measurement beam (10). In the reflection direction, a mirror (6) is arranged downstream of beam splitter (3) in such a manner that it reflects measuring beam (10) at an angle a to the optical axis of focusing lens (4) onto the latter in order to image it in an image point (17), conjugate with focal point (11), on the receiving surface of sensor (13) that is connected to an evaluation unit (14) for focus position monitoring.
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