Methods and Apparatus for Hybrid MOS Capacitors in Replacement Gate Process

摘要

Methods and apparatus for hybrid MOS capacitors in replacement gate process. A method is disclosed including patterning a gate dielectric layer and a polysilicon gate layer to form a polysilicon gate region over a substrate; forming an inter-level dielectric layer over the substrate and surrounding the polysilicon gate region; defining polysilicon resistor regions each containing at least one portion of the polysilicon gate region and not containing at least one other portion of the polysilicon gate region, forming dummy gate regions removing the dummy gate regions and the gate dielectric layer underneath the dummy gate regions to leave trenches; and forming high-k metal gate devices in the trenches. A capacitor region including a high-k metal gate and a polysilicon gate next to the high-k metal gate is disclosed. Additional hybrid capacitor apparatuses are disclosed.