发明名称 |
MICROMECHANICAL MEMBRANES AND RELATED STRUCTURES AND METHODS |
摘要 |
Micromechanical membranes suitable for formation of mechanical resonating structures are described, as well as methods for making such membranes. The membranes may be formed by forming cavities in a substrate, and in some instances may be oxidized to provide desired mechanical properties. Mechanical resonating structures may be formed from the membrane and oxide structures.
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申请公布号 |
US2013130502(A1) |
申请公布日期 |
2013.05.23 |
申请号 |
US201213673321 |
申请日期 |
2012.11.09 |
申请人 |
SAND 9, INC.;SAND 9, INC. |
发明人 |
SPARKS ANDREW;KUYPERS JAN H.;SCHOEPF KLAUS JUERGEN;REBEL REIMUND |
分类号 |
H01L21/302 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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