(110) SURFACE ORIENTATION FOR REDUCING FERMI-LEVEL-PINNING BETWEEN HIGH-K DIELECTRIC AND GROUP III-V COMPOUND SEMICONDUCTOR SUBSTRATE

摘要

A device with improved device performance, and method of manufacturing the same, are disclosed. An exemplary device includes a group III-V compound semiconductor substrate that includes a surface having a (110) crystallographic orientation, and a gate stack disposed over the group III-V compound semiconductor substrate. The gate stack includes a high-k dielectric layer disposed on the surface having the (110) crystallographic orientation, and a gate electrode disposed over the high-k dielectric layer.