| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an improved structure of a micromachined member coupled with a torsional flexure hinge and relatively rotating. <P>SOLUTION: A reference frame is coupled to a dynamic plate 58, and the frame is coupled to the plate 58 by not a torsion bar but a folded torsional flexure hinge 96. The folded torsional flexure hinge 96 for supporting the plate 58 from the frame side includes three basic hinge segments 102a, 102b, and 102c. Each of basic hinge segments 102a, 102b, and 102c has a longitudinal axis 98 which is not oriented perpendicular to the rotation axis 62 of the plate 58. An intermediate region 104 of the folded torsional flexure hinge 96 together immediately adjacent ends 106 of the basic hinge segments 102a, 102b, and 102c to one another. The basic hinge segment 102b includes a torsion sensor 108 for measuring the angular rotation of the plate 58 about the axis 62 with respect to the frame. <P>COPYRIGHT: (C)2013,JPO&INPIT |
