| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance performance of a piezoelectric element, a liquid injection head and a liquid injection device which use a non-lead piezoelectric material or a low-lead piezoelectric material. <P>SOLUTION: A manufacturing method of a piezoelectric element comprises the steps of: forming a piezoelectric layer having a perovskite oxide containing at least Bi, Ba, Fe and Ti on a first electrode; holding the piezoelectric layer at a temperature of 200°C or more and 350°C or less; and subsequently forming a second electrode on the piezoelectric layer. A manufacturing method of a liquid injection head includes the manufacturing method of the piezoelectric element. A manufacturing method of a liquid injection device includes the manufacturing method of the liquid injection head. <P>COPYRIGHT: (C)2013,JPO&INPIT |
