发明名称 METHOD FOR PRODUCING RESIST COPOLYMER HAVING LOW MOLECULAR WEIGHT
摘要 A method for producing a resist copolymer having a weight-average molecular weight of not less than 3000 and not more than 6000, in which copolymer the contents of an oligomer having a molecular weight of not more than 1000 and a byproduct derived from a polymerization initiator are small, is provided. The method for producing a resist copolymer comprises the step of continuously supplying a solution containing a monomer and a solution containing a polymerization initiator to a heated solvent to carry out a radical polymerization, wherein the variation range of the concentration of the polymerization initiator in polymerization solution is within ±25% of the median value between the maximum concentration and the minimum concentration during specific time; and the variation range of the concentration of unreacted monomer in the polymerization solution is within ±35% of the median value between the maximum concentration and the minimum concentration during specific time.
申请公布号 US2013123446(A1) 申请公布日期 2013.05.16
申请号 US201213675277 申请日期 2012.11.13
申请人 MARUZEN PETROCHEMICAL CO., LTD.;MARUZEN PETROCHEMICAL CO., LTD. 发明人 OIKAWA TOMO
分类号 C08F220/68 主分类号 C08F220/68
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