| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide the method of manufacturing a joined body having small displacement after joining, high joint strength, high air tightness, and excellent dimensional accuracy of a hollow part even when having the hollow part. <P>SOLUTION: The method of manufacturing a joined body includes the steps of: obtaining a first silicon carbide sintered object 11 and a second silicon carbide sintered object 12; processing the joint surface 12a of the second silicon carbide sintered object 12 to have a surface roughness Ra of 0.6 μm or smaller; forming a metal silicon layer 13 containing silicon carbide on the joint surface 11a of the first silicon carbide sintered object 11; abutting the joint surface 12a of the second silicon carbide sintered object 12 with a metal silicon layer 13 containing silicon carbide to perform heat treatment in vacuum. <P>COPYRIGHT: (C)2013,JPO&INPIT |
