PRODUCTION METHOD OF FERROELECTRIC MATERIAL LAYER, THIN FILM TRANSISTOR AND PIEZOELECTRIC INK JET HEAD

摘要

PROBLEM TO BE SOLVED: To provide a production method of a ferroelectric material layer the electrical characteristics of which can be enhanced furthermore.

SOLUTION: The production method of a ferroelectric material layer includes a ferroelectric material precursor layer formation step for forming the precursor layer of a ferroelectric material by coating a substrate with a sol-gel solution, a drying step for drying the precursor layer at a first temperature in the range of 120°C-250°C, a type push step for performing type push processing of the precursor layer while heating to a second temperature higher than the first temperature and in the range of 150°C-300°C, and a ferroelectric material layer formation step for forming the ferroelectric material layer from the precursor layer.

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