IMPROVED PROCESS FOR PRODUCING A DEVICE COMPRISING CAVITIES FORMED BETWEEN A SUSPENDED ELEMENT RESTING ON INSULATING PADS SEMI-BURIED IN A SUBSTRATE AND THIS SUBSTRATE

摘要

The invention relates to an improved process for producing a device comprising a plurality of cavities (150a, 150b) defined between a substrate (100) based on at least one given semiconductor material and a membrane (140) resting on the tops of insulating pads (104a, 104b, 104c) that protrude from the substrate, the process allowing the height of the one or more cavities to be adjusted independently of that of the insulating pads and cavities of different heights to be produced.