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摘要
申请公布号
JP5195747(B2)
申请公布日期
2013.05.15
申请号
JP20090506176
申请日期
2007.03.27
申请人
发明人
分类号
H01L21/336;H01L21/28;H01L21/8234;H01L21/8238;H01L27/088;H01L27/092;H01L29/423;H01L29/49;H01L29/78
主分类号
H01L21/336
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代理人
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