发明名称 |
METHOD AND DEVICE FOR CLEANING AT LEAST ONE OPTICAL COMPONENT |
摘要 |
<p>A method of cleaning at least one optical component of at least one irradiation device having at least one radiation source in a vacuum chamber. The source generates in particular extreme ultraviolet and/or soft X-ray radiation whose rays are guided via the optical component onto a workpiece to be treated, during which the optical component is at least partly polluted because of an inorganic substance introduced by the radiation source. A least one reaction partner that is substantially translucent or transparent to the rays is introduced via a feeder device in dependence on the prevailing reaction conditions. The reaction partner reacts chemically with the polluting deposits so as to remove them from the optical component.</p> |
申请公布号 |
EP1629268(B1) |
申请公布日期 |
2013.05.15 |
申请号 |
EP20040733618 |
申请日期 |
2004.05.18 |
申请人 |
PHILIPS INTELLECTUAL PROPERTY & STANDARDS GMBH;KONINKLIJKE PHILIPS ELECTRONICS N.V. |
发明人 |
ZINK, PETER;PANKERT, JOSEPH;DERRA, GUENTHER;WEBER, ACHIM |
分类号 |
G01N23/22;B08B7/00;G03F7/20;G21K1/06 |
主分类号 |
G01N23/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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