发明名称 Organic light emitting element and producing method thereof
摘要 An organic light emitting element having a metal thin film (106;404) on an upper surface of an organic thin film (105;403A,403B), is produced by mechanically cutting the metal thin film, using the cut metal thin film as a mask, and applying dry etching processing to the whole of the organic thin film (104,105;403A,403B), and to a part of the thin films on upper and lower surfaces of the organic thin film.
申请公布号 EP0847094(B1) 申请公布日期 2013.05.15
申请号 EP19970121325 申请日期 1997.12.04
申请人 HITACHI, LTD. 发明人 NAKAYAMA, TAKAHIRO;KOBAYASHI, SHINYA;SHIMADA, AKIRA
分类号 H01L51/52;H01L51/00;H01L51/30;H01L51/50;H05B33/00 主分类号 H01L51/52
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