MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

摘要

PURPOSE: A method for manufacturing an LCD array panel is provided to simplify a process for manufacturing substrates including a semiconductor substrate by using an etchant composition of a metal oxide semiconductor layer. CONSTITUTION: A gate insulating layer is formed on a substrate after a gate electrode is formed. An active layer made of metal oxide semiconductor is formed on the gate insulating layer. As the active layer is etched by using an etchant composition including hydrogen peroxide 5-25 weight %, fluorocompound 0.01-1 weight %, and azole compound 0.1-5 weight % and water, a source/drain electrode is formed on the active layer. A pixel electrode connected to the drain electrode is formed.