| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a machining device configured to prevent a decrease in suction force of a fan by preventing a foreign matter, such as shavings, from being adhered to the fan. <P>SOLUTION: The machining device includes a chuck table, a machining means 24, a machining fluid supply means, a machining chamber 31, and an exhaust path 44 which has one end communicating with the machining chamber 31 and the other end communicating with a fan 45, and discharges the atmosphere in the machining chamber 31. The machining device further includes a separation means 48 for separating a waste fluid included in the exhaust flowing in the exhaust path 44 from the machining chamber 31 from gas. The separation means 48 includes a cylindrical body 50 comprising a bottom part 50a having an intake port 54 communicating with the machining chamber 31 at one end, a raised part 50b having a gas exhaust port 56 communicating with the fan 45 at an upper end part, and a bent part 50c connecting the bottom part 50a and raised part 50b to each other; a waste fluid discharge port 58 formed in the bottom part 50a of the cylindrical body 50 and discharging a waste fluid; and a waste fluid discharge path 60 communicating with the waste fluid discharge port 58. <P>COPYRIGHT: (C)2013,JPO&INPIT |
