摘要 |
<p>In this single crystal manufacturing method using CZ method, Ni concentration of at least one black lead component used in a furnace for manufacturing a single crystal is analyzed, and the single crystal is manufactured by using a black lead component having an analyzed Ni concentration of 30 ppb or less. Consequently, the method for manufacturing the high-quality single crystal having no LT (life time) deterioration and LPD (light point defect) abnormalities generated therein in the single crystal manufacture using the CZ method is provided.</p> |