OPTICAL MODULE AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To monolithically integrate a quartz-based optical waveguide device and a photodiode on the same substrate.

SOLUTION: An optical module comprises: a silicon substrate 100; a lower clad layer 101 which is formed on the silicon substrate and composed of SiO2; a germanium photodiode 110a formed in a first region 110 on the lower clad layer 101; a silicon core 121 formed in a second region 120 continuing to the first region 110 on the lower clad layer 101; and a quartz core 131 formed from a part of the second region 120 to a third region 130 continuing to the second region 120, and further comprises an upper clad layer 103 which is formed on the germanium photodiode 110a, silicon core 121 and quartz core 131 and is composed of SiO2.

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