发明名称 CUTTING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a cutting device capable of detecting a target pattern as quickly as possible even when a direction and a position of a workpiece adhered and fixed to a dicing tape are different from those when the target pattern is registered. <P>SOLUTION: A rotation angle of a chuck table 19 rotating in a perpendicular direction as a rotation shaft is controlled by a controller, and an imaging unit 30 (imaging means) is arranged between a cassette location part 9 and a temporary locating table 12. The imaging unit 30 indexes an angle of a division scheduled line of a workpiece on the temporary locating table 12 from image information acquired by picking up an image of an upper face of the workpiece, and is rotated by a predetermined angle after the chuck table 19 holds a workpiece unit so that the angle of the division scheduled line indexed by the imaging unit 30 is parallel or orthogonal to a processing and feeding direction of the chuck table 19. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013084681(A) 申请公布日期 2013.05.09
申请号 JP20110222149 申请日期 2011.10.06
申请人 DISCO ABRASIVE SYST LTD 发明人 SAITO TAKAHIRO
分类号 H01L21/301;B24B49/12 主分类号 H01L21/301
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