| 摘要 |
<p>Provided are a laser working method and a laser working apparatus using a cooling method by a solid contact, which are freed from the problem of producing metal powder, the problem of sticking blots of a cooling member to a substrate, and the development of flaws by frictions. The laser working apparatus comprises a laser irradiation mechanism for forming a beam spot on a fragile material substrate, a substrate cooling mechanism for forming a cooling region, and a scanning mechanism for moving the beam spot and the cooling region relatively in the order of the beam spot and the cooling region along a scheduled working line set on the substrate. The substrate cooling mechanism includes a solid-phase coolant solidified by cooling a coolant material taking a gas or liquid phase at the ordinary temperature, and a push mechanism for causing the solid-phase coolant to contact the substrate.</p> |
