| 摘要 |
<p>PURPOSE: An imprint device, an imprinting method, an imprinting system, and a method for manufacturing the device are provided to prevent a substrate from forming using a damaged mold and to minimize the number of the substrates reduced for maintenance and repair. CONSTITUTION: An imprint device(100) comprises a radiating unit, a detecting unit(200), and a mold maintaining unit(130). The radiating unit radiates excitation light for irradiating a luminescent material. The mold maintaining unit is formed to maintain a mold including the luminescent material. A pattern is transferred to an imprint material, the radiating unit radiates the excitation light to the pattern. The detecting unit detects the light radiated from the luminescent material remains in the imprint material.</p> |
