ROTARY DEPOSITION APPARATUS

摘要

PURPOSE: A rotary deposition apparatus is provided to improve the uniformity of a thin film by rotating a substrate or the nozzle part of a deposition source. CONSTITUTION: A substrate holding part(33) fixes a substrate. A first rotation part(36) is connected to the substrate holding part and includes a first driving part and a first shaft. A deposition source(39) evaporates a deposition material stored in a crucible and discharges it to the substrate via a mask. A second rotation unit(43) includes a second driving part(41) and a second shaft(42). A driving part rotates a nozzle part(38) having nozzles connected to the evaporation source.