SEMICONDUCTOR DEVICE INCLUDING GROUP III-V COMPOUND SEMICONDUCTOR LAYER, AND METHOD OF MANUFACTURING THE SEMICONDUCTOR DEVICE

摘要

A semiconductor device may include a silicon (Si) substrate including a hole, a hard mask around the hole on the Si substrate, a first material layer filling the hole and on a portion of the hard mask, an upper material layer on the first material layer, and a device layer on the upper material layer. The first material layer may be a Group III-V material layer. The Group III-V material layer may be a Group III-V compound semiconductor layer. The upper material layer may be a portion of the first material layer. The upper material layer may include one of a same material as the first material layer and a different material from the first material layer.