| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pressure control device capable of controlling pressure precisely at high speed. <P>SOLUTION: A pressure control device in an embodiment comprises a valve, a shaft part connected to the valve, a solenoid part, a micrometer part, and a control part. The solenoid part adjusts a gate opening degree of the valve via the shaft part by moving the shaft part in an axial direction by solenoid-driving. The micrometer part is detachably/attachably mounted to the shaft part, and adjusts the gate opening degree of the valve via the shaft part by moving the shaft part in the axial direction by a spring mechanism when it is mounted to the shaft part. The control part mounts the micrometer part to the shaft part when gas pressure is controlled using the micrometer part, and detaches the micrometer part from the shaft part when the gas pressure is controlled. <P>COPYRIGHT: (C)2013,JPO&INPIT |
