| 摘要 |
A laser apparatus may include a laser oscillator capable of tuning a spectral bandwidth of a laser beam to be outputted therefrom, a spectrum detecting unit that detects a spectrum of the laser beam outputted from the laser oscillator and an attenuation unit capable of regulating light intensity of the laser beam that enters the spectrum detecting unit. The attenuation unit may include a variable attenuator whose transmittance varies depending on an incident position of the laser beam and a movement mechanism that moves the variable attenuator so that the incident position of the laser beam is changed.
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