| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser beam machining device capable of prolonging the duration of life while maintaining processing accuracy. <P>SOLUTION: The laser beam machining device includes galvano mirrors 22, 23 which reflect laser light from a laser source, and galvano motors 24, 25 which pivot the galvano mirrors 22, 23 by pivoting shaft portions 24a, 25a to which these mirrors are attached. Then, laser light L is scanned by pivoting the galvano mirrors 22, 23. In this case, the frequency of use of the galvano mirrors 22, 23 is cumulated for each setting position of coordinate systems in an X-axis direction and a Y-axis direction set for a machinable region A of the laser light L; and a determination is made whether or not a difference exceeding a predetermined value is generated in cumulated values of respective frequency of use of adjacent setting positions among the respective setting positions. Then, in the case where the difference exceeding the predetermined value is generated, the galvano mirrors 22, 23 are pivoted in a zone of the setting position where the difference of the cumulated values of the respective frequency of use is generated. <P>COPYRIGHT: (C)2013,JPO&INPIT |
